Each PROBATH™ is built upon 20+ years experience in the semiconductor industry (including 8+ years of in-fab experience). We believe we build the best, safest wet etch quartz baths available today for wet process equipment environments in the semiconductor industry.

Each bath includes:

  • 3 over-temperature snap switches
  • Rotomolded PVDF enclosure (Polypro available for solvent use at no additional charge)
  • 2 J-type thermocouples
  • Molded inner vessel is 99.995% pure silica quartz
  • 5-sided custom designed heater
  • Alumina silica refractory insulation rated at 1315 degrees Centigrade

Most standard quartz baths are in stock and available for same day shipment. All baths are manufactured in our Arizona (USA) facility. Call or email for a price quote and warranty information. See below for product listing and specifications.

Options:

  • We regularly build custom sizes and configurations.
  • Various styles of quartz drains available.
  • RTD and other sensor types available.

   

 
Model PB 4200 PB 5200 PB 6100 PB 6200 PB 8100
 Boat Capacity 2 - 4" 2 - 5" 1 - 6" 2 - 6" 1 - 8"
 Inside Dimensions (inches) 11.5 x 7.5 x 8 13.5 x 7.5 x 9 7.75 x 7.75 x 10 16 x 8 x 10 12 x 11 x 11.75
 Deck Cut Out (inches) 14 x 10 16 x 10 10.25 x 10.25 18.5 x 10.5 14.5 x 13.5
 Deck Area Required (inches) 15.125 x 11.125 17.125 x 11.125 11.385 x 11.385 19.625 x 11.625 15.625 x 14.625
 Power at 208V, 60 HZ 3000W 14.4A 3000W 14.4A 2200W 10.6A 4000W 19.2A 4000W 19.2A
 Minimum Liquid Capacity 3" from Top 1.75 G - 6.6 L 2.5 G - 9.45 L 1.75 G - 6.6 L 3.7 G - 14 L 4.75 G - 18 L
 Maximum Liquid Capacity 1" from Top 2.5 G - 9.45 L 3.35 G - 12.7 L 2.25 G - 8.5 L 4.75 G - 18 L 5.85 G - 22.15 L


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