We repair all EPI quartz parts, 200 mil and smaller and have 25 years experience in ASM Epsilon quartz repair. This includes repair for:
We repair all parts to the manufacturer’s original specifications, our prices reflect our low overhead and lead time on standard fire polish and clean is two weeks.
- Up to 8 inch wafer size.
Square chambers, atmospheric (ATM) and reduced pressure (RP)
- Susceptor rings and supports.
- Getter supports.
- 6-inch and 8-inch Feet.
- Quartz tools (lifter susceptor ring, lifter susceptor support and pull rod).