We repair all EPI quartz parts, 200 mil and smaller and have 25 years experience in ASM Epsilon quartz repair. This includes repair for:

  • Up to 8 inch wafer size.
  • Square chambers, atmospheric (ATM) and reduced pressure (RP) .
  • Susceptor rings and supports.
  • Getter supports.
  • 6-inch and 8-inch Feet.
  • Quartz tools (lifter susceptor ring, lifter susceptor support and pull rod).
We repair all parts to the manufacturer’s original specifications, our prices reflect our low overhead and lead time on standard fire polish and clean is two weeks.

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